"Everyone, since Xu Dong has instructions, we will implement the assembly and debugging steps of the krypton fluoride lithography machine according to Xu Dong's thinking." Hu Mingzhen saw that Xu Zhenming had made a decision, and he was relieved.He then put forward plans for the final assembly, commissioning and trial production of the krypton fluoride laser optical system at the meeting.
After some discussion, the engineers participating in the meeting proposed a plan to assemble the krypton fluoride laser light path system just made by Hao Ning's team and the main base of the third-generation lithography machine produced by Yiming Group. Check this machine The performance of the lithography machine.
But Xu Zhenming disagreed, "If this method is adopted, the speed is a bit slow, and it will probably be delayed until after the Spring Festival."
"Xu Dong, what good plan do you have?" Hu Mingzhen looked at Xu Zhenming in surprise.
Xu Zhenming laughed and said: "We adopted a two-pronged approach this time. The domestic laser light path system is matched with Laomi’s main base of the lithography machine and assembled into a krypton fluoride lithography machine. At the same time, Laomi’s laser light path system is exactly the same as our domestic Lithography machine to match."
"No, Xu Dong." Hearing this, Hu Mingzhen was the first to object.He believes that this method may damage the imported lithography machine, and the loss is relatively large.
At this time, other engineers who participated in the meeting also agreed with Hu Mingzhen’s point of view, thinking that this method was inappropriate, and it might cost more than 20 million dollars.
If this happens, Yima Group will suffer a big loss.
"I'm not afraid of losing money. I can afford the tuition of more than 20 million dollars." But Xu Zhenming disagrees, thinking that there is no tuition for product development.
Xu Zhenming insisted that two lithography machines assemble the laser optical system at the same time, debug at the same time, and test production at the same time.Only in this way can time be saved.
"97 is a special year, and many major events will happen. For example, the return of Hong Kong, the sooner our lithography machine is developed, it will help to enhance the image of the country." Xu Zhenming said his thoughts in a serious tone.
After the Spring Festival, he still has a series of big investment plans to be implemented, which requires the domestic third-generation lithography machine to be developed and marketed as soon as possible.
"Hey...well, Dong Xu, we will execute according to your plan." Since Xu Zhenming insisted on taking risks and the two lithography machines started debugging simultaneously, Hu Mingzhen had no choice but to arrange tasks according to this plan.
He divided the engineers who got up to the conference room today into two groups.Wanning Guhezhang Neodymium Gold Group is responsible for restoring imported fluoride krypton lithography machines.He himself and He Changlin were in charge of the assembly and debugging of domestic lithography machines.
The members of Professor Hao Ning’s team were not idle, and they were divided into two groups to support the two teams of Hu Mingzhen and Wanninggu.
"Okay, that's it. Let's start today." After hearing Hu Mingzhen's plans and arrangements, Xu Zhenming stood up with a smile.He is ready to go to watch the domestic laser optical path system and the matching test of the Laomi lithography machine with Wanninggu immediately.
Soon, Xu Zhenming followed Wan Ninggu, Professor Hao Ning and some engineers to the No. 4 steel structure factory.This plant is the production workshop of the No. 4 0.018 micron chip production line. Production has been completely stopped at this time, waiting for the final assembly and commissioning of the domestic lithography machine.
In the dust-free lithography room in the workshop, there was a third-generation lithography machine that was disassembled at this time.This equipment is an imported lithography machine that was disassembled by Hu Mingzhen and others to imitate the laser optical system.
In order to ensure the accuracy of this imported third-generation lithography machine, the main base system of the lithography machine has been installed in place at this time.The adjusted equipment foundation, anti-vibration, anti-electromagnetic interference and other measures have been put in place and done very well.
In the workshop, Zhang Neojin leads the general production management team members and is inspecting this disintegrated third-generation lithography machine.
"Lao Li, when installing the domestic laser light path system later, you must be careful and send more people to help install the equipment in place." At this time, Zhang Nyjin asked while checking the installation holes of the lithography machine. With Xu Zhenming's master Li Quan.
Li Quan is the maintenance person in charge of the chip production line and the semiconductor equipment production line. He has a group of senior fitters, senior technicians and other team members.
Moreover, he is more rigorous in his work, and he is squatting on the ground to check the installation holes of the lithography machine."Well, I know Mr. Zhang, you put one hundred and twenty hearts, we won't mess around." Li Quan comforted Zhang Nyjin who was a little nervous while working.
Zhang Ru Neodymium was a little nervous at this time, for fear that Xu Zhenming's task would be messed up.If this happens, the lithography machine from Intel Corporation in the United States will be scrapped.
Therefore, Zhang Nyjin spoke intently staring at the movements in Li Quan's hands.
At this time, Li Quan and others are testing data such as the amount of deformation of the mounting hole of the lithography machine.The movements in their hands looked very savage and rough to Zhang Nyujin, and they could ruin this imported lithography machine at any time.
"How about it, has the distance between the installation hole position and the equipment space changed?" At this moment, Xu Zhenming just walked in and squatted down to look at the laser generator's installation work surface.
Hearing this sentence, Li Quan turned his face and raised his eyebrows, “The stability of the foreigner’s equipment is good, and the mounting holes are very stable, just like the initial data.”
"That's good! Ha ha ha ha..." Zhang Neojin smiled happily.He was afraid that there would be any problems with the main system of the installed lithography machine, and it would not be beautiful by then.
"Report Xu Dong, the main body of this foreigner's lithography machine, the performance is very stable and exactly the same as the initial inspection."
"Xu Dong, shall we begin to install the laser light path system now?"
"Stop talking nonsense, let's work now."
The installation technicians under Li Quan have tested the installation surface of the laser optical system, and briefly reported the test results to Xu Zhenming.
Judging from the situation they reported, this third-generation lithography machine main system used to make samples has very good performance and is not affected by the working environment, and can be used for testing at any time.
After hearing this introduction, Xu Zhenming waved his hand, "What are you waiting for, let's start the experiment now."
After this order, everyone immediately became busy.
Someone is in charge of unloading the spare parts packaging box of the domestic krypton fluoride laser optical system by forklifts; someone is responsible for unpacking; others are assembling the accessories of the krypton fluoride laser optical system into a whole, ready to install on the main base of the lithography machine In place.
Seeing this scene, Xu Zhenming did not interrupt and say anything.He is very unfamiliar with the lithography machine, and he can't make arbitrary commands.
"How about Lao Zhang? Can the laser light path system produced by ourselves be matched with Laomi's lithography machine?" After watching for a while, Xu Zhenming stood up and asked Zhang Nyjin who was standing by.
"Everyone, since Xu Dong has instructions, we will implement the assembly and debugging steps of the krypton fluoride lithography machine according to Xu Dong's thinking." Hu Mingzhen saw that Xu Zhenming had made a decision, and he was relieved.He then put forward plans for the final assembly, commissioning and trial production of the krypton fluoride laser optical system at the meeting.
After some discussion, the engineers participating in the meeting proposed a plan to assemble the krypton fluoride laser light path system just made by Hao Ning's team and the main base of the third-generation lithography machine produced by Yiming Group. Check this machine The performance of the lithography machine.
But Xu Zhenming disagreed, "If this method is adopted, the speed is a bit slow, and it will probably be delayed until after the Spring Festival."
"Xu Dong, what good plan do you have?" Hu Mingzhen looked at Xu Zhenming in surprise.
Xu Zhenming laughed and said: "We adopted a two-pronged approach this time. The domestic laser light path system is matched with Laomi’s main base of the lithography machine and assembled into a krypton fluoride lithography machine. At the same time, Laomi’s laser light path system is exactly the same as our domestic Lithography machine to match."
"No, Xu Dong." Hearing this, Hu Mingzhen was the first to object.He believes that this method may damage the imported lithography machine, and the loss is relatively large.
At this time, other engineers who participated in the meeting also agreed with Hu Mingzhen’s point of view, thinking that this method was inappropriate, and it might cost more than 20 million dollars.
If this happens, Yima Group will suffer a big loss.
"I'm not afraid of losing money. I can afford the tuition of more than 20 million dollars." But Xu Zhenming disagrees, thinking that there is no tuition for product development.
Xu Zhenming insisted that two lithography machines assemble the laser optical system at the same time, debug at the same time, and test production at the same time.Only in this way can time be saved.
"97 is a special year, and many major events will happen. For example, the return of Hong Kong, the sooner our lithography machine is developed, it will help to enhance the image of the country." Xu Zhenming said his thoughts in a serious tone.
After the Spring Festival, he still has a series of big investment plans to be implemented, which requires the domestic third-generation lithography machine to be developed and marketed as soon as possible.
"Hey...well, Dong Xu, we will execute according to your plan." Since Xu Zhenming insisted on taking risks and the two lithography machines started debugging simultaneously, Hu Mingzhen had no choice but to arrange tasks according to this plan.
He divided the engineers who got up to the conference room today into two groups.Wanning Guhezhang Neodymium Gold Group is responsible for restoring imported fluoride krypton lithography machines.He himself and He Changlin were in charge of the assembly and debugging of domestic lithography machines.
The members of Professor Hao Ning’s team were not idle, and they were divided into two groups to support the two teams of Hu Mingzhen and Wanninggu.
"Okay, that's it. Let's start today." After hearing Hu Mingzhen's plans and arrangements, Xu Zhenming stood up with a smile.He is ready to go to watch the domestic laser optical path system and the matching test of the Laomi lithography machine with Wanninggu immediately.
Soon, Xu Zhenming followed Wan Ninggu, Professor Hao Ning and some engineers to the No. 4 steel structure factory.This plant is the production workshop of the No. 4 0.018 micron chip production line. Production has been completely stopped at this time, waiting for the final assembly and commissioning of the domestic lithography machine.
In the dust-free lithography room in the workshop, there was a third-generation lithography machine that was disassembled at this time.This equipment is an imported lithography machine that was disassembled by Hu Mingzhen and others to imitate the laser optical system.
In order to ensure the accuracy of this imported third-generation lithography machine, the main base system of the lithography machine has been installed in place at this time.The adjusted equipment foundation, anti-vibration, anti-electromagnetic interference and other measures have been put in place and done very well.
In the workshop, Zhang Neojin leads the general production management team members and is inspecting this disintegrated third-generation lithography machine.
"Lao Li, when installing the domestic laser light path system later, you must be careful and send more people to help install the equipment in place." At this time, Zhang Nyjin asked while checking the installation holes of the lithography machine. With Xu Zhenming's master Li Quan.
Li Quan is the maintenance person in charge of the chip production line and the semiconductor equipment production line. He has a group of senior fitters, senior technicians and other team members.
Moreover, he is more rigorous in his work, and he is squatting on the ground to check the installation holes of the lithography machine."Well, I know Mr. Zhang, you put one hundred and twenty hearts, we won't mess around." Li Quan comforted Zhang Nyjin who was a little nervous while working.
Zhang Ru Neodymium was a little nervous at this time, for fear that Xu Zhenming's task would be messed up.If this happens, the lithography machine from Intel Corporation in the United States will be scrapped.
Therefore, Zhang Nyjin spoke intently staring at the movements in Li Quan's hands.
At this time, Li Quan and others are testing data such as the amount of deformation of the mounting hole of the lithography machine.The movements in their hands looked very savage and rough to Zhang Nyujin, and they could ruin this imported lithography machine at any time.
"How about it, has the distance between the installation hole position and the equipment space changed?" At this moment, Xu Zhenming just walked in and squatted down to look at the laser generator's installation work surface.
Hearing this sentence, Li Quan turned his face and raised his eyebrows, “The stability of the foreigner’s equipment is good, and the mounting holes are very stable, just like the initial data.”
"That's good! Ha ha ha ha..." Zhang Neojin smiled happily.He was afraid that there would be any problems with the main system of the installed lithography machine, and it would not be beautiful by then.
"Report Xu Dong, the main body of this foreigner's lithography machine, the performance is very stable and exactly the same as the initial inspection."
"Xu Dong, shall we begin to install the laser light path system now?"
"Stop talking nonsense, let's work now."
The installation technicians under Li Quan have tested the installation surface of the laser optical system, and briefly reported the test results to Xu Zhenming.
Judging from the situation they reported, this third-generation lithography machine main system used to make samples has very good performance and is not affected by the working environment, and can be used for testing at any time.
After hearing this introduction, Xu Zhenming waved his hand, "What are you waiting for, let's start the experiment now."
After this order, everyone immediately became busy.
Someone is in charge of unloading the spare parts packaging box of the domestic krypton fluoride laser optical system by forklifts; someone is responsible for unpacking; others are assembling the accessories of the krypton fluoride laser optical system into a whole, ready to install on the main base of the lithography machine In place.
Seeing this scene, Xu Zhenming did not interrupt and say anything.He is very unfamiliar with the lithography machine, and he can't make arbitrary commands.
"How about Lao Zhang? Can the laser light path system produced by ourselves be matched with Laomi's lithography machine?" After watching for a while, Xu Zhenming stood up and asked Zhang Nyjin who was standing by.
