"Xu Dong, according to the current situation, the laser light path system produced by our group company should be able to match the foreigner's lithography machine." Hu Mingzhen only has nine levels of assurance, and did not say the situation is dead.He is still a little worried that this laser light path system cannot provide a precise laser light source.
The principle of a lithography machine is basically the same as that of a camera, and both use exposure to image.But the accuracy of the third-generation lithography machine is very high, as low as 0.018 microns.If FinFET process technology and immersion lithography process technology are used again, the accuracy should reach below 0.01 microns.
It can be imagined that the third-generation lithography machine must have very high requirements on the power and stability of the laser light source, and ordinary countries cannot produce such cutting-edge equipment.This is what Hu Mingzhen is worried about.
While talking, Hu Mingzhen instructed Li Quan and others how to assemble precision equipment such as laser generators, optical instruments, and optical lenses.The assembly process is very important, and it can directly affect the accuracy and reliability of the laser optical system. Hu Mingzhen had to act carefully.
"When can the assembly work be completed?"
Seeing that the progress of Li Quan and others is not very fast, Xu Zhenming thinks it is meaningless to stand here, and is going to inspect the workshop next door.Before leaving, he asked Hu Mingzhen for a project schedule for the assembly and commissioning of this lithography machine.
"Xu Dong, if everything goes well, we will start trial production around January 28 and use this lithography machine to tape out the film." Hu Mingzhen is busy, and after a few words with Xu Zhenming, he starts to work again.
Seeing this, Xu Zhenming walked towards the next workshop while holding a pile of documents printed on A4 paper.
"Complete the equipment assembly and installation within three days, debug this equipment within five days, and start preparing for trial production after the ninth day... Well, this plan is not bad.
Xu Zhenming nodded while walking, thinking that Hu Mingzhen was doing a good job and was well prepared.
Not long after, he came to another lithography room in the No. 4 steel structure factory.
This lithography room is used to install the production workshop of domestic lithography machines.
The workshop is also very busy at this time, and people like Wanninggu, He Changlin and Hao Ning are also assembling the third-generation lithography machine.
Their progress here seems to be much faster. The components of the laser optical system have been assembled, and the main system of the lithography machine has been assembled.Wan Gu Ning and others are holding an on-site discussion meeting, as if preparing for the final assembly process of the lithography machine.
Seeing this situation, Xu Zhenming didn't understand, "Lao Wan, why is the progress on your side faster?"
"Xu Dong, we have prepared the main components of this lithography machine, and we are waiting for final assembly and commissioning." Wan Ninggu told Xu Zhenming that the laser optical path system of this lithography machine is imported, in fact, it is not necessary to test its performance. .The most critical thing depends on the effect of the final assembly of the lithography machine.
"The accuracy of the lithography machine is mainly affected by the main system, base, lateral movement, shock absorption and other subsystems. In case the main mechanical system of this equipment is not accurate enough, our project is still unsuccessful."
At the end, Wan Ninggu's eyebrows all wrinkled.He was very worried about the accuracy of the main system of this lithography machine, and he was not sure about it.
Hearing this, Xu Zhenming's mood didn't get better."How long do you need to prepare?" Thinking of this, Xu Zhenming wanted to know the final assembly and commissioning plan of Wanninggu and others.
"About three days." He Changlin glanced at the scene and said slowly.
"I'm afraid it won't work for three days. It will take at least five days."
"Up to five days, Xu Dong. After five days, we can do tape-out tests."
The opinions of Wan Ninggu, Hao Ning and others are not uniform. One said it would take more than three days, and the other said it would take five days.
Seeing this situation, Xu Zhenming nodded slightly, "Okay, I will look at your results in five days." After saying this, he didn't even bother to wait here, holding a stack of report data and left No. 4 Large steel structure workshop.
Five days later, at about nine o'clock in the morning, Xu Zhenming came to this lithography room again, wanting to know the progress of the project of Wanning Gu and others.
At this time, the workshop has been cleaned up, and an assembled lithography machine stands in the center of the workshop.
This lithography machine is the result of the labor of Wanninggu and others. The main system is all made by Yiming Group. The laser light path system is a sample removed from the US lithography.
"Prepare to boot, start the cooling circulating water exchanger system first." Wan Ninggu took the walkie-talkie at this time and gave orders to his team members.
Seeing Xu Zhenming coming, he smiled and told Xu Zhenming, "Xu Dong, we have completed the preliminary debugging of this domestic lithography machine, and no problems have been found so far."
Wan Ninggu told Xu Zhenming that they had completed the assembly of the lithography machine a day ago, and the first preliminary debugging found that there was a problem. The heat dissipation defects of the domestic laser light source system would affect the performance of the third generation lithography machine.
"So, we temporarily added a circulating water cooling system to cool down the lithography machine." Wan Ninggu smiled.
Xu Zhenming did not understand these technical details, but was only interested in the success time of this lithography machine."Are you going to do it now? Are you going to debug it soon?" He glanced sideways at Wan Ninggu and the others.
"Xu Dong, we are now testing this lithography machine."
"In one hour, we can do tape-out simulation experiments."
He Changlin and others gave Xu Zhenming a clear answer.From this point of view, they have already conducted preliminary debugging and trial production of this third-generation lithography machine in the country, otherwise they would not have such confidence.
Hearing this, Xu Zhenming felt much better.He stood there quietly, his eyes falling on Wanninggu and others.
"Report to Mr. Wan that the circulating water cooling system has been started."
"Mr. Wan, the air purification and smoking system has been activated, and we can start doing lithography simulation experiments at any time."
"Mr. Wan, shall we start now?"
Not long after, the engineers of Wanningguo had finished their work, and they came to report the results of their inspections.In fact, without them reporting the situation, Wanninggu already knew the data results of this device.
At this moment, the main workstation of this lithography machine is showing various data on the monitor.These data are the real-time data of each part of the lithography machine.For example, the temperature and humidity in the lithography workshop, the size of dust particles in the workshop, etc.
However, Wan Ninggu did not judge according to the data displayed on the screen of the lithography machine workstation.He still arranges personnel to go to a data investigation and check real-time data.
After some comparisons, Wanninggu looked at the data table file in his hand again and found that all the data were normal.He then waved his hand at the team members who were down, "Go! Let's start doing lithography simulation experiments immediately."
"Xu Dong, according to the current situation, the laser light path system produced by our group company should be able to match the foreigner's lithography machine." Hu Mingzhen only has nine levels of assurance, and did not say the situation is dead.He is still a little worried that this laser light path system cannot provide a precise laser light source.
The principle of a lithography machine is basically the same as that of a camera, and both use exposure to image.But the accuracy of the third-generation lithography machine is very high, as low as 0.018 microns.If FinFET process technology and immersion lithography process technology are used again, the accuracy should reach below 0.01 microns.
It can be imagined that the third-generation lithography machine must have very high requirements on the power and stability of the laser light source, and ordinary countries cannot produce such cutting-edge equipment.This is what Hu Mingzhen is worried about.
While talking, Hu Mingzhen instructed Li Quan and others how to assemble precision equipment such as laser generators, optical instruments, and optical lenses.The assembly process is very important, and it can directly affect the accuracy and reliability of the laser optical system. Hu Mingzhen had to act carefully.
"When can the assembly work be completed?"
Seeing that the progress of Li Quan and others is not very fast, Xu Zhenming thinks it is meaningless to stand here, and is going to inspect the workshop next door.Before leaving, he asked Hu Mingzhen for a project schedule for the assembly and commissioning of this lithography machine.
"Xu Dong, if everything goes well, we will start trial production around January 28 and use this lithography machine to tape out the film." Hu Mingzhen is busy, and after a few words with Xu Zhenming, he starts to work again.
Seeing this, Xu Zhenming walked towards the next workshop while holding a pile of documents printed on A4 paper.
"Complete the equipment assembly and installation within three days, debug this equipment within five days, and start preparing for trial production after the ninth day... Well, this plan is not bad.
Xu Zhenming nodded while walking, thinking that Hu Mingzhen was doing a good job and was well prepared.
Not long after, he came to another lithography room in the No. 4 steel structure factory.
This lithography room is used to install the production workshop of domestic lithography machines.
The workshop is also very busy at this time, and people like Wanninggu, He Changlin and Hao Ning are also assembling the third-generation lithography machine.
Their progress here seems to be much faster. The components of the laser optical system have been assembled, and the main system of the lithography machine has been assembled.Wan Gu Ning and others are holding an on-site discussion meeting, as if preparing for the final assembly process of the lithography machine.
Seeing this situation, Xu Zhenming didn't understand, "Lao Wan, why is the progress on your side faster?"
"Xu Dong, we have prepared the main components of this lithography machine, and we are waiting for final assembly and commissioning." Wan Ninggu told Xu Zhenming that the laser optical path system of this lithography machine is imported, in fact, it is not necessary to test its performance. .The most critical thing depends on the effect of the final assembly of the lithography machine.
"The accuracy of the lithography machine is mainly affected by the main system, base, lateral movement, shock absorption and other subsystems. In case the main mechanical system of this equipment is not accurate enough, our project is still unsuccessful."
At the end, Wan Ninggu's eyebrows all wrinkled.He was very worried about the accuracy of the main system of this lithography machine, and he was not sure about it.
Hearing this, Xu Zhenming's mood didn't get better."How long do you need to prepare?" Thinking of this, Xu Zhenming wanted to know the final assembly and commissioning plan of Wanninggu and others.
"About three days." He Changlin glanced at the scene and said slowly.
"I'm afraid it won't work for three days. It will take at least five days."
"Up to five days, Xu Dong. After five days, we can do tape-out tests."
The opinions of Wan Ninggu, Hao Ning and others are not uniform. One said it would take more than three days, and the other said it would take five days.
Seeing this situation, Xu Zhenming nodded slightly, "Okay, I will look at your results in five days." After saying this, he didn't even bother to wait here, holding a stack of report data and left No. 4 Large steel structure workshop.
Five days later, at about nine o'clock in the morning, Xu Zhenming came to this lithography room again, wanting to know the progress of the project of Wanning Gu and others.
At this time, the workshop has been cleaned up, and an assembled lithography machine stands in the center of the workshop.
This lithography machine is the result of the labor of Wanninggu and others. The main system is all made by Yiming Group. The laser light path system is a sample removed from the US lithography.
"Prepare to boot, start the cooling circulating water exchanger system first." Wan Ninggu took the walkie-talkie at this time and gave orders to his team members.
Seeing Xu Zhenming coming, he smiled and told Xu Zhenming, "Xu Dong, we have completed the preliminary debugging of this domestic lithography machine, and no problems have been found so far."
Wan Ninggu told Xu Zhenming that they had completed the assembly of the lithography machine a day ago, and the first preliminary debugging found that there was a problem. The heat dissipation defects of the domestic laser light source system would affect the performance of the third generation lithography machine.
"So, we temporarily added a circulating water cooling system to cool down the lithography machine." Wan Ninggu smiled.
Xu Zhenming did not understand these technical details, but was only interested in the success time of this lithography machine."Are you going to do it now? Are you going to debug it soon?" He glanced sideways at Wan Ninggu and the others.
"Xu Dong, we are now testing this lithography machine."
"In one hour, we can do tape-out simulation experiments."
He Changlin and others gave Xu Zhenming a clear answer.From this point of view, they have already conducted preliminary debugging and trial production of this third-generation lithography machine in the country, otherwise they would not have such confidence.
Hearing this, Xu Zhenming felt much better.He stood there quietly, his eyes falling on Wanninggu and others.
"Report to Mr. Wan that the circulating water cooling system has been started."
"Mr. Wan, the air purification and smoking system has been activated, and we can start doing lithography simulation experiments at any time."
"Mr. Wan, shall we start now?"
Not long after, the engineers of Wanningguo had finished their work, and they came to report the results of their inspections.In fact, without them reporting the situation, Wanninggu already knew the data results of this device.
At this moment, the main workstation of this lithography machine is showing various data on the monitor.These data are the real-time data of each part of the lithography machine.For example, the temperature and humidity in the lithography workshop, the size of dust particles in the workshop, etc.
However, Wan Ninggu did not judge according to the data displayed on the screen of the lithography machine workstation.He still arranges personnel to go to a data investigation and check real-time data.
After some comparisons, Wanninggu looked at the data table file in his hand again and found that all the data were normal.He then waved his hand at the team members who were down, "Go! Let's start doing lithography simulation experiments immediately."
