At this time, Liang Songsong also squatted down, keeping his eyes on the connection mechanism of the main system.He wanted to find out the cause of the malfunction and prove that his guess was not wrong.
"The connection mechanism of our lithography machine is an imitation after surveying and mapping. There is no original drawing, and the accuracy is not guaranteed. Therefore, it is a problem with the connection mechanism." After careful observation for a long time, Liang Songsong concluded decisively. , It is believed that the main system of the lithography machine is malfunctioning.
His theory is somewhat reasonable, but what does it have to do with the quality defects after the two systems are combined?
Therefore, Wanninggu disagrees with Liang Songsong's opinion at all, "The laser optical path system and the main system of the lithography machine are rigidly connected. What does it have to do with this set of connection mechanisms?"
The rigid connection only needs to ensure the stability of the connection mechanism, and will not affect the performance stability of the two sets of mechanisms.Besides, this connecting mechanism uses hydraulic locking to ensure stability, which will not affect the stability of the two systems of the lithography machine at all.
Wanninggu was very familiar with the structure of the lithography machine, and immediately ruled out Liang Songsong's argument.According to his assumption, everyone should not dig deeper into the stability of this connection mechanism.
At this moment, Xu Zhenming, with frowning eyebrows, raised his eyebrows slightly and glanced at Wanning Gu beside him."Lao Wan, will the vibration of the lithography machine and electromagnetic clutter interference affect the stability of the lithography machine?"
"Well... it will definitely have an impact. Otherwise, the working environment of the lithography machine is very demanding, the foundation must have anti-vibration facilities, and the electromagnetic clutter on the spot must be shielded."
Wan Ninggu frowned and said, still considering other influencing factors.In his opinion, this inspection is going to be a lot more troublesome. It is necessary to disassemble the components of the main system of the lithography machine one by one and inspect and test separately.
At this time, Professor Hao Ning, who was standing not far away, suddenly slapped his thigh, "I know what the reason is, it should be caused by the resonance of the vibration wave, or the frequency of electromagnetic clutter and the frequency of the laser wave interfere with each other. "
Professor Hao Ning is an optical expert and an authoritative person in professional fields such as optical wave and electromagnetic wave.After Xu Zhenming's reminder, he was inspired in an instant and said a point of view that made Xu Zhenming feel unpredictable.
The particle and wave forms of light waves and electromagnetic waves were involved in Xu Zhenming's self-study of high school physics, but they have long forgotten about them.And Professor Hao Ning’s point of view involves the theory of quantum physics, how can he understand it?
Not only Xu Zhenming didn't understand, but the two expert-level figures, Wanninggu and Liang Songsong at the scene, could only say that they knew a little bit.Experts dominate in their own fields, and the gap between them and ordinary people is not that big.
Therefore, Wanning Gu stood up excitedly, stared at Professor Hao Ning and asked loudly: "Professor Hao, tell me, what is the defect of this lithography machine?"
"Is it possible?" Liang Songsong stood up dubiously at this time, his suspicious eyes kept on Professor Hao Ning's face.
Professor Hao Ning was very excited at this moment, and nodded repeatedly, "It must be the problem. Xu Dong's vision is still more accurate, and you can find the defects of this lithography machine in one click." While talking, he took out his notebook and put Today’s inspiration is recorded.
After doing this, he laughed at everyone and said: "We all know the principle of resonance. If the vibration wave of the main system of this lithography machine is consistent with the vibration wave frequency of the laser optical system, resonance will occur. If this The electromagnetic clutter frequency of the main system of the lithography machine is consistent with the frequency of the laser..."
"Laser can also produce resonance phenomenon!" At this moment, everyone present said in unison.
All the people present are technicians, and they still know some general physics knowledge.These people, including Xu Zhenming, instantly understood Professor Hao Ning's theory.
"In this case, what are we still doing? Let's start working!" Xu Zhenming is in a very good mood now, and he glances at everyone with a smile.
"Haha... It turned out to be Bo's problem!"
"I just don't know which system has the problem with the waves? Or is there electromagnetic clutter?"
The technicians were joking and began to disassemble the sensor connected to the main system.
They are going to connect this set of sensors to the laser optical system to test the electromagnetic clutter frequency and vibration frequency of this laser optical system.As for the frequency of the laser beam emitted from the laser head, the data has already been stored in the computer of the workstation.
………
………
In this way, an hour later, the test data of the two systems have been printed out.
"Xu Dong, it turned out to be the problem of vibration waves. The frequency of the vibration waves of the main system of our lithography machine and the laser optical path system are very close, and resonance will occur." Wanning Gu raised the A4 printing paper in his hand, his face Smiled happily.
After this tossing, he was heartbroken.Now that he can accurately locate the cause of the defect of this lithography machine, how can he not be overjoyed?
The same is true for Xu Zhenming.Through this popular science, he is relatively proficient in the principles of the third-generation KrF lithography machine.Although you can't be as proficient as the experts such as Wanninggu, Liang Songsong, and Hao Ning, if you go to fool laymen, you will be fine.
The deeper reason is that Xu Zhenming is confident about the performance of this domestic third-generation lithography machine through this experiment.
"Our group company finally made such a small step. The first domestic KrF lithography machine will be born in the near future, and it will be born in my hands. Hehe..." Xu Zhenming smiled very happy.
He smiled and asked the excited Wanning Gu, "Lao Wan, now that we have found the cause, when can we solve this defect?"
"Xu Dong should be soon! Old Liang, don't you?" Wanning Gu laughed and joked with the gloomy Liang Songsong.
Liang Songsong's mood at this time is very complicated. Fortunately, he did not rush to the head, and said his own judgment and assumptions, "If this is the reason for the failure of this lithography machine at the meeting, I should be embarrassed now."
He thought coldly, looking at Xu Zhenming with complicated eyes, "How can he observe that there is a problem with the connection mechanism?"
Liang Songsong has a lot of inner dramas, and at this time he has actually thought of a good way to solve this problem.But at this kind of moment, he didn't want to say it, so as not to be frustrated again.
At this time, Professor Hao Ning came to Xu Zhenming's side."Xu Dong, I suggest that we hold a technical discussion meeting to solve this problem through discussion." He was very cautious and did not draw any conclusions in the field he was not good at.
"Yes, yes, yes! Professor Hao made a lot of sense. To solve this technical problem perfectly, we should brainstorm. Dong Xu, I suggest that the scope of people participating in the technical discussion meeting should be expanded. Lao Hu and Lao Zhang are all Come to participate."
Wanning Gu Xi smiled and gave Xu Zhenming suggestions.His proposal is constructive and can solve the technical defects of the two lithography machines in a package.
But Xu Zhenming didn't think so at this time. Instead, he stretched out his hand and looked at the watch on his wrist. "It's dinner time. Let's eat first and then make a decision. Haha..."
At this time, Liang Songsong also squatted down, keeping his eyes on the connection mechanism of the main system.He wanted to find out the cause of the malfunction and prove that his guess was not wrong.
"The connection mechanism of our lithography machine is an imitation after surveying and mapping. There is no original drawing, and the accuracy is not guaranteed. Therefore, it is a problem with the connection mechanism." After careful observation for a long time, Liang Songsong concluded decisively. , It is believed that the main system of the lithography machine is malfunctioning.
His theory is somewhat reasonable, but what does it have to do with the quality defects after the two systems are combined?
Therefore, Wanninggu disagrees with Liang Songsong's opinion at all, "The laser optical path system and the main system of the lithography machine are rigidly connected. What does it have to do with this set of connection mechanisms?"
The rigid connection only needs to ensure the stability of the connection mechanism, and will not affect the performance stability of the two sets of mechanisms.Besides, this connecting mechanism uses hydraulic locking to ensure stability, which will not affect the stability of the two systems of the lithography machine at all.
Wanninggu was very familiar with the structure of the lithography machine, and immediately ruled out Liang Songsong's argument.According to his assumption, everyone should not dig deeper into the stability of this connection mechanism.
At this moment, Xu Zhenming, with frowning eyebrows, raised his eyebrows slightly and glanced at Wanning Gu beside him."Lao Wan, will the vibration of the lithography machine and electromagnetic clutter interference affect the stability of the lithography machine?"
"Well... it will definitely have an impact. Otherwise, the working environment of the lithography machine is very demanding, the foundation must have anti-vibration facilities, and the electromagnetic clutter on the spot must be shielded."
Wan Ninggu frowned and said, still considering other influencing factors.In his opinion, this inspection is going to be a lot more troublesome. It is necessary to disassemble the components of the main system of the lithography machine one by one and inspect and test separately.
At this time, Professor Hao Ning, who was standing not far away, suddenly slapped his thigh, "I know what the reason is, it should be caused by the resonance of the vibration wave, or the frequency of electromagnetic clutter and the frequency of the laser wave interfere with each other. "
Professor Hao Ning is an optical expert and an authoritative person in professional fields such as optical wave and electromagnetic wave.After Xu Zhenming's reminder, he was inspired in an instant and said a point of view that made Xu Zhenming feel unpredictable.
The particle and wave forms of light waves and electromagnetic waves were involved in Xu Zhenming's self-study of high school physics, but they have long forgotten about them.And Professor Hao Ning’s point of view involves the theory of quantum physics, how can he understand it?
Not only Xu Zhenming didn't understand, but the two expert-level figures, Wanninggu and Liang Songsong at the scene, could only say that they knew a little bit.Experts dominate in their own fields, and the gap between them and ordinary people is not that big.
Therefore, Wanning Gu stood up excitedly, stared at Professor Hao Ning and asked loudly: "Professor Hao, tell me, what is the defect of this lithography machine?"
"Is it possible?" Liang Songsong stood up dubiously at this time, his suspicious eyes kept on Professor Hao Ning's face.
Professor Hao Ning was very excited at this moment, and nodded repeatedly, "It must be the problem. Xu Dong's vision is still more accurate, and you can find the defects of this lithography machine in one click." While talking, he took out his notebook and put Today’s inspiration is recorded.
After doing this, he laughed at everyone and said: "We all know the principle of resonance. If the vibration wave of the main system of this lithography machine is consistent with the vibration wave frequency of the laser optical system, resonance will occur. If this The electromagnetic clutter frequency of the main system of the lithography machine is consistent with the frequency of the laser..."
"Laser can also produce resonance phenomenon!" At this moment, everyone present said in unison.
All the people present are technicians, and they still know some general physics knowledge.These people, including Xu Zhenming, instantly understood Professor Hao Ning's theory.
"In this case, what are we still doing? Let's start working!" Xu Zhenming is in a very good mood now, and he glances at everyone with a smile.
"Haha... It turned out to be Bo's problem!"
"I just don't know which system has the problem with the waves? Or is there electromagnetic clutter?"
The technicians were joking and began to disassemble the sensor connected to the main system.
They are going to connect this set of sensors to the laser optical system to test the electromagnetic clutter frequency and vibration frequency of this laser optical system.As for the frequency of the laser beam emitted from the laser head, the data has already been stored in the computer of the workstation.
………
………
In this way, an hour later, the test data of the two systems have been printed out.
"Xu Dong, it turned out to be the problem of vibration waves. The frequency of the vibration waves of the main system of our lithography machine and the laser optical path system are very close, and resonance will occur." Wanning Gu raised the A4 printing paper in his hand, his face Smiled happily.
After this tossing, he was heartbroken.Now that he can accurately locate the cause of the defect of this lithography machine, how can he not be overjoyed?
The same is true for Xu Zhenming.Through this popular science, he is relatively proficient in the principles of the third-generation KrF lithography machine.Although you can't be as proficient as the experts such as Wanninggu, Liang Songsong, and Hao Ning, if you go to fool laymen, you will be fine.
The deeper reason is that Xu Zhenming is confident about the performance of this domestic third-generation lithography machine through this experiment.
"Our group company finally made such a small step. The first domestic KrF lithography machine will be born in the near future, and it will be born in my hands. Hehe..." Xu Zhenming smiled very happy.
He smiled and asked the excited Wanning Gu, "Lao Wan, now that we have found the cause, when can we solve this defect?"
"Xu Dong should be soon! Old Liang, don't you?" Wanning Gu laughed and joked with the gloomy Liang Songsong.
Liang Songsong's mood at this time is very complicated. Fortunately, he did not rush to the head, and said his own judgment and assumptions, "If this is the reason for the failure of this lithography machine at the meeting, I should be embarrassed now."
He thought coldly, looking at Xu Zhenming with complicated eyes, "How can he observe that there is a problem with the connection mechanism?"
Liang Songsong has a lot of inner dramas, and at this time he has actually thought of a good way to solve this problem.But at this kind of moment, he didn't want to say it, so as not to be frustrated again.
At this time, Professor Hao Ning came to Xu Zhenming's side."Xu Dong, I suggest that we hold a technical discussion meeting to solve this problem through discussion." He was very cautious and did not draw any conclusions in the field he was not good at.
"Yes, yes, yes! Professor Hao made a lot of sense. To solve this technical problem perfectly, we should brainstorm. Dong Xu, I suggest that the scope of people participating in the technical discussion meeting should be expanded. Lao Hu and Lao Zhang are all Come to participate."
Wanning Gu Xi smiled and gave Xu Zhenming suggestions.His proposal is constructive and can solve the technical defects of the two lithography machines in a package.
But Xu Zhenming didn't think so at this time. Instead, he stretched out his hand and looked at the watch on his wrist. "It's dinner time. Let's eat first and then make a decision. Haha..."
