"Lao Hu, come. Let's take a group photo together!" At this time, Professor Dong waved vigorously towards Hu Mingzhen who was watching the monitor of the workstation.
"Yes! We must record such an important moment."
"Xiao Liang, Lao Hao, you all have a group photo together."
Professor Dong, Professor Shan and other academician-level experts and professors were very excited and couldn't restrain their inner excitement.They were all dancing and talking.
The photoetching speed of silicon wafers is very fast, and the exposure process can be completed for an 8-inch silicon wafer in less than two minutes.Because this time to do a tape-out project for the Suzaku Core I chip is actually a test.Hu Mingzhen did not arrange mass production, and only asked his team to prepare 10 silicon wafers.
When Professor Dong and others invited him to take a group photo, the KrF lithography machine at work had completed the process of exposing the first silicon wafer and taking about 95 seconds.This speed should be the world's first at present, far exceeding the three KrF lithography machines shipped from the United States.
Not only that, this third-generation lithography machine designed by Hu Mingzhen has been adhering to the tradition of Mingxin Manufacturing Company, adopting a duplex process technology and having two workbenches.
When Professor Liu and the group were excited, the laser head of this lithography machine had moved its position and moved to another worktable to scan the mask and expose the silicon wafer.
At the same time, another inspection laser head starts to work to inspect the exposed silicon wafers and perform the wafer inspection process before the silicon wafer etching process.
This set of process technology is the Foundry process patented technology of Yiming Group, and it is generally not developed externally.
Professor Liu, Professor Dong, Professor Shan and other general academician experts are also stunned. They have to report to the head of the headquarters the scientific research results of the first third-generation lithography machine in the country, so that they can watch the chip lithography process in such a confidential environment. Process flow.So these people are very excited and a little bit unable to control themselves.
Looking at these gray-haired experts and professors, Hu Mingzhen shook his head slightly with a smile, "Lao Liu, let's not worry about taking pictures together. Let's wait for the results of the inspections to come out."
Chip lithography and inspection wafers are microscopic precision processes, and the results cannot be checked with the naked eye.The lithography process and the inspection process can only be displayed by computer simulation.
Liang Songsong's job at this time is to observe the results of the inspection data of the chip scanning lithography, staring at the display of the workstation without blinking.Suddenly, he laughed, "It's done, teacher. The first silicon wafer lithography yield rate reached 100%!"
Having said this, he jumped up and jumped up from the computer swivel chair.
Although the photolithography process is only the first step of the chip tapeout process, the subsequent processes will still reduce the chip yield, but the success rate of 100% is worth celebrating.
"One hundred percent yield? So amazing?" Professor Liu was a little dumbfounded when he heard this data.
The same is true for other experts and professors, and they all rushed to the screen of the workstation, wanting to have a quick look.
At this moment, a group of graph comparison data displayed on the computer screen does not have any chip physical graph, which is not very intuitive.However, the comparison data of those groups can clearly indicate the success rate of the exposure lithography of the first silicon wafer.
"Experts, our lithography machine uses a scanning exposure process technology, and its principle is very similar to the scanning process of a copier. When the laser head sweeps over the mask, the laser exposes the physical circuit diagram on the mask. The photoresist coating on the silicon wafer leaves the image of the circuit diagram..."
Liang Songsong pointed to the computer screen and introduced the process flow of the photolithography process and silicon wafer comparison process simulated on the computer screen to these experts one by one.
These experts have rich theoretical knowledge, but the lithography process technology of the third-generation lithography machine is relatively unfamiliar.
Especially the FinFET process technology invented by Hu Mingzhen, they only read technical papers and reports in professional magazines, and have not seen it with their own eyes.Today I can have this opportunity to see the KrF lithography machine implement lithography, inspection and other process flow, which is finally an eye-opener.
"The technology of this system is really strong, and it has exceeded my expectations."
"I didn't expect that our country could also manufacture this kind of cutting-edge precision equipment!"
"Professor Hu, you have won glory for our country."
Professor Liu, Professor Dong, Professor Shan and others tweeted their praise, with expressions of admiration on their faces.
If you are not convinced, the facts are in front of you.
This group of professors are making small calculations at this time, ready to go back and immediately encourage their students to take up positions in Yiming Group."Why study abroad? It is much better to work at Mingxin Manufacturing Company than studying abroad!" They all thought.
At this time, Liang Songsong triumphantly introduced, "Experts, advanced process technology such as duplex process technology, FinFET process technology, scanning process technology, etc., are all developed by our team and teachers. They are used on the second-generation lithography machine. Has been verified.
"Not only that, our lithography machine also uses an immersion process technology. The lithography accuracy has been improved again by a big margin. This immersion process technology is unique in the world, and the Miguo is to get this process technology. I gave us three KrF lithography machines..."
Although Professor Liu and others have heard of the allusion by Liang Songsong from news reports, now they hear this story with their own ears, they are so excited, like drinking honey.
"Our state-of-China state-of-the-art technology is not inferior to the level of foreigners!" They were all excited, their chests stood up involuntarily, and their waists were worth it.
"Don't talk about it, get ready to take pictures as a souvenir." At this time, Hu Mingzhen, an expert in chip technology, gave Liang Songsong an order to disappoint.
Liang Songsong had no choice but to smile apologetically at the experts, and began to prepare to arrange wooden chairs, curtains, cameras and other facilities.He also knew that his teacher was deliberately distracting himself, not allowing himself to praise the achievements of the teacher and the team here.
"Lao Hu, judging from the current situation, the performance of this lithography machine should meet the design requirements, right?" Professor Liu was still not satisfied, glanced at Liang Songsong who was leaving, and walked to Hu Mingzhen's side.
But Hu Mingzhen shook his head slightly, "According to my intention, the speed of this lithography machine should reach one silicon wafer per minute. However, due to factors such as machinery, light source power, and light source accuracy, our speed is only Can reach 67% of the design data. Ashamed..."
Even though this lithography machine may be the most advanced lithography machine in the world, Hu Mingzhen is still a little dissatisfied with his work.
"Lao Hu, don't be hypocritical. With this lithography machine, our waists have been straightened!" At this moment, Zhang Nyijing came to the doorman of the lithography room and grinned. Joking.
"Lao Hu, come. Let's take a group photo together!" At this time, Professor Dong waved vigorously towards Hu Mingzhen who was watching the monitor of the workstation.
"Yes! We must record such an important moment."
"Xiao Liang, Lao Hao, you all have a group photo together."
Professor Dong, Professor Shan and other academician-level experts and professors were very excited and couldn't restrain their inner excitement.They were all dancing and talking.
The photoetching speed of silicon wafers is very fast, and the exposure process can be completed for an 8-inch silicon wafer in less than two minutes.Because this time to do a tape-out project for the Suzaku Core I chip is actually a test.Hu Mingzhen did not arrange mass production, and only asked his team to prepare 10 silicon wafers.
When Professor Dong and others invited him to take a group photo, the KrF lithography machine at work had completed the process of exposing the first silicon wafer and taking about 95 seconds.This speed should be the world's first at present, far exceeding the three KrF lithography machines shipped from the United States.
Not only that, this third-generation lithography machine designed by Hu Mingzhen has been adhering to the tradition of Mingxin Manufacturing Company, adopting a duplex process technology and having two workbenches.
When Professor Liu and the group were excited, the laser head of this lithography machine had moved its position and moved to another worktable to scan the mask and expose the silicon wafer.
At the same time, another inspection laser head starts to work to inspect the exposed silicon wafers and perform the wafer inspection process before the silicon wafer etching process.
This set of process technology is the Foundry process patented technology of Yiming Group, and it is generally not developed externally.
Professor Liu, Professor Dong, Professor Shan and other general academician experts are also stunned. They have to report to the head of the headquarters the scientific research results of the first third-generation lithography machine in the country, so that they can watch the chip lithography process in such a confidential environment. Process flow.So these people are very excited and a little bit unable to control themselves.
Looking at these gray-haired experts and professors, Hu Mingzhen shook his head slightly with a smile, "Lao Liu, let's not worry about taking pictures together. Let's wait for the results of the inspections to come out."
Chip lithography and inspection wafers are microscopic precision processes, and the results cannot be checked with the naked eye.The lithography process and the inspection process can only be displayed by computer simulation.
Liang Songsong's job at this time is to observe the results of the inspection data of the chip scanning lithography, staring at the display of the workstation without blinking.Suddenly, he laughed, "It's done, teacher. The first silicon wafer lithography yield rate reached 100%!"
Having said this, he jumped up and jumped up from the computer swivel chair.
Although the photolithography process is only the first step of the chip tapeout process, the subsequent processes will still reduce the chip yield, but the success rate of 100% is worth celebrating.
"One hundred percent yield? So amazing?" Professor Liu was a little dumbfounded when he heard this data.
The same is true for other experts and professors, and they all rushed to the screen of the workstation, wanting to have a quick look.
At this moment, a group of graph comparison data displayed on the computer screen does not have any chip physical graph, which is not very intuitive.However, the comparison data of those groups can clearly indicate the success rate of the exposure lithography of the first silicon wafer.
"Experts, our lithography machine uses a scanning exposure process technology, and its principle is very similar to the scanning process of a copier. When the laser head sweeps over the mask, the laser exposes the physical circuit diagram on the mask. The photoresist coating on the silicon wafer leaves the image of the circuit diagram..."
Liang Songsong pointed to the computer screen and introduced the process flow of the photolithography process and silicon wafer comparison process simulated on the computer screen to these experts one by one.
These experts have rich theoretical knowledge, but the lithography process technology of the third-generation lithography machine is relatively unfamiliar.
Especially the FinFET process technology invented by Hu Mingzhen, they only read technical papers and reports in professional magazines, and have not seen it with their own eyes.Today I can have this opportunity to see the KrF lithography machine implement lithography, inspection and other process flow, which is finally an eye-opener.
"The technology of this system is really strong, and it has exceeded my expectations."
"I didn't expect that our country could also manufacture this kind of cutting-edge precision equipment!"
"Professor Hu, you have won glory for our country."
Professor Liu, Professor Dong, Professor Shan and others tweeted their praise, with expressions of admiration on their faces.
If you are not convinced, the facts are in front of you.
This group of professors are making small calculations at this time, ready to go back and immediately encourage their students to take up positions in Yiming Group."Why study abroad? It is much better to work at Mingxin Manufacturing Company than studying abroad!" They all thought.
At this time, Liang Songsong triumphantly introduced, "Experts, advanced process technology such as duplex process technology, FinFET process technology, scanning process technology, etc., are all developed by our team and teachers. They are used on the second-generation lithography machine. Has been verified.
"Not only that, our lithography machine also uses an immersion process technology. The lithography accuracy has been improved again by a big margin. This immersion process technology is unique in the world, and the Miguo is to get this process technology. I gave us three KrF lithography machines..."
Although Professor Liu and others have heard of the allusion by Liang Songsong from news reports, now they hear this story with their own ears, they are so excited, like drinking honey.
"Our state-of-China state-of-the-art technology is not inferior to the level of foreigners!" They were all excited, their chests stood up involuntarily, and their waists were worth it.
"Don't talk about it, get ready to take pictures as a souvenir." At this time, Hu Mingzhen, an expert in chip technology, gave Liang Songsong an order to disappoint.
Liang Songsong had no choice but to smile apologetically at the experts, and began to prepare to arrange wooden chairs, curtains, cameras and other facilities.He also knew that his teacher was deliberately distracting himself, not allowing himself to praise the achievements of the teacher and the team here.
"Lao Hu, judging from the current situation, the performance of this lithography machine should meet the design requirements, right?" Professor Liu was still not satisfied, glanced at Liang Songsong who was leaving, and walked to Hu Mingzhen's side.
But Hu Mingzhen shook his head slightly, "According to my intention, the speed of this lithography machine should reach one silicon wafer per minute. However, due to factors such as machinery, light source power, and light source accuracy, our speed is only Can reach 67% of the design data. Ashamed..."
Even though this lithography machine may be the most advanced lithography machine in the world, Hu Mingzhen is still a little dissatisfied with his work.
"Lao Hu, don't be hypocritical. With this lithography machine, our waists have been straightened!" At this moment, Zhang Nyijing came to the doorman of the lithography room and grinned. Joking.
