"Old Zhang, you just came here, and the following work will be handed over to you." Hu Mingzhen looked at the workbench of the lithography machine and prepared to hand over the flow-out process of the Suzaku Core I chip.Relatively speaking, Zhang Nyijing, who is in charge of production, is an expert in this aspect, and it is most suitable for him to preside over the follow-up process.
"No problem! Isn't it just 7 silicon wafers left? I will finish the lithography process in 20 minutes." Zhang Nyijing winked and came to Hu Mingzhen's side.
He glanced at the workbench, then glanced at the workstation display of the lithography machine."Oh, the effect of this lithography machine is very good. The average lithography time is 95.4 seconds, which is 7.5 seconds faster than Laomi's lithography machine." He then smacked his tongue and half-jokingly made Hu Mingzhen happy. .
In fact, Zhang Neojing is also a member of the team and is not satisfied with the speed of this domestic KrF lithography machine.When they designed this lithography machine, they planned to complete the lithography exposure process of a silicon wafer in 75 seconds.The current efficiency has plummeted, and some process adjustments are needed.
But Professor Liu, Professor Dong, Professor Shan and others are all laymen who are proficient in theoretical knowledge. Seeing Zhang Neojing talking like this, they all nodded in agreement.
"Professor Zhang is right. As long as the speed of our lithography machine exceeds that of Laomi's products, it is a victory!"
"In terms of the speed of lithography exposure, the technology of our lithography machine is already at the pinnacle of the world."
"Lao Hu, come and take pictures, don't make it like a little girl's house. You are the core character, you should sit in the middle."
Professor Dong grabbed Hu Mingzhen, and directly dragged him past the photo location.
These people do not understand the pursuits of Hu Mingzhen and Zhang Neojing, and are actually very satisfied with the current results.
From the bottom of their hearts, their academicians have recognized the performance of this domestic third-generation lithography machine.As long as the Suzaku Core 1 chip is successfully taped out and the quality inspection report comes out, Professor Liu and others will sign and confirm the demonstration report.
But Hu Mingzhen was still thinking about it at this time, looking for the reason for the slowdown of this lithography machine."Lao Zhang, what do you think is the problem?" He frowned and asked Zhang Nyijing on the way to take a photo.
"There are problems everywhere. For example, the composition of alloy materials, machining accuracy, mechanical assembly accuracy, matching accuracy of the laser optical system... etc. etc.. The combination of all factors has led to our lithography machine The speed cannot be increased, otherwise the yield rate will not meet the standard."
Zhang Neojing put away his cynical appearance and frowned slightly while doing technical analysis with Hu Mingzhen.
Hey...it seems we still have to redesign a lithography machine!
"This can only be done! I just don't know if Xu Donghui will support our work." Zhang Neojing patted Hu Mingzhen on the back and sighed slightly.
At this moment, the technician responsible for operating the lithography machine workstation loudly reported the results of the inspection data of the third silicon wafer, "Reporting President Hu and Zhang, the lithography yield of the third silicon wafer exceeded 98.23%, there is a scrap chip."
"Eh? The laser light source is a bit unstable?"
"It must be a light source problem!"
Hearing this, Hu Mingzhen and Zhang Nyijing, who had already filmed the team, almost simultaneously said the same reason.
For Professor Liu and others, these data are already very high qualified data.In their view, even lithography machines imported from the United States or island countries cannot achieve such a high yield.
What's more, the lithography machines that Professor Liu and others can access are all second-hand lithography machines eliminated abroad, and they are all first and second generation contact lithography machines.
Insufficient insights and different horizons will result in very different results.
"Lao Hu, Lao Zhang, the data you just reported is very good. You two smile at the camera!" Professor Liu turned his face to greet Hu Mingzhen and Zhang Nyijing.
Hu Mingzhen glanced at his lips and smiled bitterly at Zhang Neojing, "Let's take a picture first. You will do the experiment later to find out the cause of the problem."
"This can only be done!" Zhang Neojing nodded knowingly.
With a creaking sound, the wry smiles of Hu Mingzhen and Zhang Nyijing were fixed on the photo taken in this group photo.
Just after finishing the photo taking ceremony, Zhang Neojing yelled at his technicians, "Xiao Li, you immediately activate the emergency air cooling device to cool down the laser optical system."
Hearing this, Professor Hao Ning frowned, "Old Zhang, do you mean that the temperature of the laser generator is too high and the laser particles are unstable?"
Zhang Neojing didn't speak, nodded slightly, frowned and walked towards the workstation of the lithography machine.
Hu Mingzhen's expression was the same as him, and he was also very serious at this time.
They were so serious, which surprised Professor Liu and others, "The current data is very good, Lao Hu, how unhappy they are?"
With this suspicion in mind, a group of academician-level experts such as Professor Liu, Professor Shan, and Professor Dong all smiled and watched the data on the computer screen with Hu Mingzhen and others.
At this moment, this lithography machine has completed the lithography process of the fifth silicon wafer, and the laser head is moving, moving laterally towards another worktable.
"Look, teacher, the intensity of the laser particles is coming up." At this time, the technician who was operating the workstation pointed to the computer screen and reported data in surprise.
The intensity of the laser particles will directly affect the yield of the lithography process, and fluctuations of high and low are generally not allowed.
"Old Hao, it's because your laser generator has a problem!" Upon seeing this scene, Hu Mingzhen turned his face to remind Professor Hao Ning.
Professor Hao Ning's brows can't help but frown, "That's the truth, but we can only achieve this precision at present."
He told Hu Mingzhen that there are many factors that affect the laser generator, and only the purity of the halide will produce N kinds of laser particles.Not to mention the mechanical materials, machining accuracy, mechanical assembly accuracy of the laser generator, etc., will affect the intensity of the laser particles.
"Long knowledge! No wonder our country is so far behind foreigners in the field of laser generators."
"So, the technology contained in the lithography machine in front of us is far beyond our expectations."
"I think we can now make a conclusion and conclude that this KrF lithography machine has been successfully developed."
"I agree with Lao Shan."
After listening to Professor Hao Ning's explanation, Professor Liu, Professor Shan, Professor Dong and others were rather happy, and they had already come up with the preliminary judgment of the demonstration review in the lithography room.
In their opinion, the Hu Mingzhen team has been very successful in achieving this step.
The achievements of this lithography machine project are far greater than the significance of the project itself.
However, at this time, Hu Mingzhen frowned slightly to discuss with Zhang Neojing, "Old Zhang, I think you have to add two batches of tape-out engineering tests."
"Yes, one is the high power consumption mode for lithography experiments, and the other is the normal rated power mode for lithography experiments."
"What about the experimental funding?" Hu Mingzhen frowned.
"Old Zhang, you just came here, and the following work will be handed over to you." Hu Mingzhen looked at the workbench of the lithography machine and prepared to hand over the flow-out process of the Suzaku Core I chip.Relatively speaking, Zhang Nyijing, who is in charge of production, is an expert in this aspect, and it is most suitable for him to preside over the follow-up process.
"No problem! Isn't it just 7 silicon wafers left? I will finish the lithography process in 20 minutes." Zhang Nyijing winked and came to Hu Mingzhen's side.
He glanced at the workbench, then glanced at the workstation display of the lithography machine."Oh, the effect of this lithography machine is very good. The average lithography time is 95.4 seconds, which is 7.5 seconds faster than Laomi's lithography machine." He then smacked his tongue and half-jokingly made Hu Mingzhen happy. .
In fact, Zhang Neojing is also a member of the team and is not satisfied with the speed of this domestic KrF lithography machine.When they designed this lithography machine, they planned to complete the lithography exposure process of a silicon wafer in 75 seconds.The current efficiency has plummeted, and some process adjustments are needed.
But Professor Liu, Professor Dong, Professor Shan and others are all laymen who are proficient in theoretical knowledge. Seeing Zhang Neojing talking like this, they all nodded in agreement.
"Professor Zhang is right. As long as the speed of our lithography machine exceeds that of Laomi's products, it is a victory!"
"In terms of the speed of lithography exposure, the technology of our lithography machine is already at the pinnacle of the world."
"Lao Hu, come and take pictures, don't make it like a little girl's house. You are the core character, you should sit in the middle."
Professor Dong grabbed Hu Mingzhen, and directly dragged him past the photo location.
These people do not understand the pursuits of Hu Mingzhen and Zhang Neojing, and are actually very satisfied with the current results.
From the bottom of their hearts, their academicians have recognized the performance of this domestic third-generation lithography machine.As long as the Suzaku Core 1 chip is successfully taped out and the quality inspection report comes out, Professor Liu and others will sign and confirm the demonstration report.
But Hu Mingzhen was still thinking about it at this time, looking for the reason for the slowdown of this lithography machine."Lao Zhang, what do you think is the problem?" He frowned and asked Zhang Nyijing on the way to take a photo.
"There are problems everywhere. For example, the composition of alloy materials, machining accuracy, mechanical assembly accuracy, matching accuracy of the laser optical system... etc. etc.. The combination of all factors has led to our lithography machine The speed cannot be increased, otherwise the yield rate will not meet the standard."
Zhang Neojing put away his cynical appearance and frowned slightly while doing technical analysis with Hu Mingzhen.
Hey...it seems we still have to redesign a lithography machine!
"This can only be done! I just don't know if Xu Donghui will support our work." Zhang Neojing patted Hu Mingzhen on the back and sighed slightly.
At this moment, the technician responsible for operating the lithography machine workstation loudly reported the results of the inspection data of the third silicon wafer, "Reporting President Hu and Zhang, the lithography yield of the third silicon wafer exceeded 98.23%, there is a scrap chip."
"Eh? The laser light source is a bit unstable?"
"It must be a light source problem!"
Hearing this, Hu Mingzhen and Zhang Nyijing, who had already filmed the team, almost simultaneously said the same reason.
For Professor Liu and others, these data are already very high qualified data.In their view, even lithography machines imported from the United States or island countries cannot achieve such a high yield.
What's more, the lithography machines that Professor Liu and others can access are all second-hand lithography machines eliminated abroad, and they are all first and second generation contact lithography machines.
Insufficient insights and different horizons will result in very different results.
"Lao Hu, Lao Zhang, the data you just reported is very good. You two smile at the camera!" Professor Liu turned his face to greet Hu Mingzhen and Zhang Nyijing.
Hu Mingzhen glanced at his lips and smiled bitterly at Zhang Neojing, "Let's take a picture first. You will do the experiment later to find out the cause of the problem."
"This can only be done!" Zhang Neojing nodded knowingly.
With a creaking sound, the wry smiles of Hu Mingzhen and Zhang Nyijing were fixed on the photo taken in this group photo.
Just after finishing the photo taking ceremony, Zhang Neojing yelled at his technicians, "Xiao Li, you immediately activate the emergency air cooling device to cool down the laser optical system."
Hearing this, Professor Hao Ning frowned, "Old Zhang, do you mean that the temperature of the laser generator is too high and the laser particles are unstable?"
Zhang Neojing didn't speak, nodded slightly, frowned and walked towards the workstation of the lithography machine.
Hu Mingzhen's expression was the same as him, and he was also very serious at this time.
They were so serious, which surprised Professor Liu and others, "The current data is very good, Lao Hu, how unhappy they are?"
With this suspicion in mind, a group of academician-level experts such as Professor Liu, Professor Shan, and Professor Dong all smiled and watched the data on the computer screen with Hu Mingzhen and others.
At this moment, this lithography machine has completed the lithography process of the fifth silicon wafer, and the laser head is moving, moving laterally towards another worktable.
"Look, teacher, the intensity of the laser particles is coming up." At this time, the technician who was operating the workstation pointed to the computer screen and reported data in surprise.
The intensity of the laser particles will directly affect the yield of the lithography process, and fluctuations of high and low are generally not allowed.
"Old Hao, it's because your laser generator has a problem!" Upon seeing this scene, Hu Mingzhen turned his face to remind Professor Hao Ning.
Professor Hao Ning's brows can't help but frown, "That's the truth, but we can only achieve this precision at present."
He told Hu Mingzhen that there are many factors that affect the laser generator, and only the purity of the halide will produce N kinds of laser particles.Not to mention the mechanical materials, machining accuracy, mechanical assembly accuracy of the laser generator, etc., will affect the intensity of the laser particles.
"Long knowledge! No wonder our country is so far behind foreigners in the field of laser generators."
"So, the technology contained in the lithography machine in front of us is far beyond our expectations."
"I think we can now make a conclusion and conclude that this KrF lithography machine has been successfully developed."
"I agree with Lao Shan."
After listening to Professor Hao Ning's explanation, Professor Liu, Professor Shan, Professor Dong and others were rather happy, and they had already come up with the preliminary judgment of the demonstration review in the lithography room.
In their opinion, the Hu Mingzhen team has been very successful in achieving this step.
The achievements of this lithography machine project are far greater than the significance of the project itself.
However, at this time, Hu Mingzhen frowned slightly to discuss with Zhang Neojing, "Old Zhang, I think you have to add two batches of tape-out engineering tests."
"Yes, one is the high power consumption mode for lithography experiments, and the other is the normal rated power mode for lithography experiments."
"What about the experimental funding?" Hu Mingzhen frowned.
